Techniques for Testing Thin Films in Tension
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چکیده
A review chapter 1 summarized the techniques and procedures for measuring the mechanical properties of freestanding films as of the end of 2000. Test methods can be characterized as direct or indirect. In the former, the property of interest is measured independently, e.g. Young’s modulus from separate measurements of force, area, and strain on a tensile specimen. In the latter, a model of the test structure is used, e.g. Young’s modulus determined from force, geometry, and displacement of a cantilever beam. This paper presents a tensile test method for directly measuring strength and indirectly measuring modulus of a thin film—silicon dioxide. These techniques are demonstrated in two tests on gold film. The approach is not new, but the detailed experimental techniques may be useful.
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